INTEGRATED CIRCUITS RESEARCH LAB

Bahram Ganji

   

       Journal Publications:

 

          1.            Ganji, B. A. and Majlis, B. Y., 2009. Design and fabrication of a new MEMS capacitive microphone using a perforated aluminum diaphragm. Sensors and Actuators A 149. pp. 29-37.

 

        2.        Ganji, B. A. and Majlis, B. Y., 2009. Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm. J. Micro/Nanolith. MEMS MOEMS 8(2), DOI: 10.1117/1.3091941, pp.021112 (1-7).

 

          3.            Ganji, B. A. and Majlis, B. Y., 2008. Analytical Analysis of Flat and Corrugated Membranes for MEMS Capacitive Sensors. International journal of Nonlinear Dynamics in Engineering and Sciences, 1:1, pp. 47-57.

 

         4.            Ganji, B. A. and Majlis, B. Y., 2008. Design and Fabrication of a New MEMS Capacitive Microphone using a Perforated Aluminum Diaphragm. International journal of Engineering.

 

          5.            Ganji, B. A. and Majlis, B. Y., 2009. Fabrication of Deep Trenches in Silicon Wafer using Deep Reactive Ion Etching with Aluminum Mask. Journal Sains Malaysiana.

 

        6.            B. A. Ganji, 2003. Simulation of electrical characteristics of bipolar transistors, Journal of technical engineering of mazandaran university.

 

           7.            B. A., Ganji, and B. Y., Majlis, 2009. Very Deep Trenches in Silicon Wafer using DRIE Method with Aluminum Mask, Iranian Journal of Materials Science & Engineering Vol. 6, Number 3, Summer 2009, pp.21-27.

 

          8.            I.C. GEBESHUBER, H. STACHELBERGER, B.A. GANJI, D.C. FU, J. YUNAS and B.Y. MAJLIS, 2009.  Exploring the Innovational Potential of Biomimetics for Novel 3D MEMS, Advanced Materials Research, Vol. 74, pp. 265-268.

 

            9.            B. A., Ganji, and B. Y., Majlis, 2009. High Sensitivity and Small Size MEMS Capacitive Microphone using a Novel Slotted Diaphragm, Microsystem Technology, Vol. 15, Issue 9, pp: 1401-1406, (DOI: 10.1007/s00542-009-0902-6).

 

 

 

        International Conferences Publications:

             

          1.  Ganji, B. A. and Majlis, B. Y., 2006. A high sensitivity MEMS capacitive    microphone using polysilicon diaphragm. International Conference on MEMS and Nanotechnology (ICMN’06), pp.159-167.

 

           2.   Ganji, B. A. and Majlis, B. Y., 2006. Optimization of design parameters for high sensitivity MEMS capacitive microphone. Asia-Pacific Conference of Transducers and Micro-Nano Technology—APCOT 2006, pp. 1-4.

 

           3.      Ganji, B. A. and Majlis, B. Y., 2006. Deep trenches in silicon structure using DRIE method with aluminum as an etching mask. 2006 IEEE, International Conference on Semiconductor Electronics (ICSE 2006), pp. 41-47.

 

          4.    Ganji, B. A. and Majlis, B. Y., 2006. The Effect of design parameters on static and dynamic behaviors of the MEMS Microphone. 2006 IEEE, International Conference on Semiconductor Electronics (ICSE 2006), pp. 35-40.

 

           5.    Majlis, B. Y., and Ganji, B. A., 2005. Pull-in voltage and diaphragm deflection analysis of MEMS capacitive microphone. International Conference on Instrumentation, Communication and Information Technology (ICICI) 2005 Proc. pp. 772-779.

 

          6.    Ganji, B. A. and Majlis, B. Y., 2005. Analytical study and FEA simulation on the square polysilicon diaphragms for MEMS capacitive microphones. Proceeding of the International Conference on Robotics, Vision, Information, and Signal Processing (ROVISP 2005), pp. 6-10.

 

           7.     Ganji, B. A. and Majlis, B. Y., 2005. Design and FEA simulation of single wafer process MEMS capacitive microphones. Proceeding of the International Conference on Robotics, Vision, Information, and Signal Processing (ROVISP 2005), pp. 11-15.

 

           8.      Ganji, B. A. and Majlis, B. Y., 2005. The dynamic behavior of the MEMS capacitive microphone. Proceedings 2005 IEEE, National Symposium on Microelectronics, NSM 2005, pp. 28-33.

 

           9.    Ganji, B. A. and Majlis, B. Y., 2004. Modeling of diaphragms for micromachined condenser microphones. Proceedings 2004 IEEE, International conference on semiconductor electronics (ICSE 2004), pp. 15-21.

 

           10.  Ganji, B. A. and Majlis, B. Y., 2004. Condenser microphone performance simulation using equivalent circuit method. Proceedings 2004 IEEE, International Conference on Semiconductor Electronics (ICSE 2004), pp. 22-29.

 

           11.    Sidek, O. B. and Ganji, B. A., 2003. Micromachined optical gas sensor for environmental applications. Proceeding of the International Conference on Robotics, Vision, Information, and Signal Processing (ROVISP 2003), pp. 762-766.

 

            12.    Ganji, B. A. and Majlis, B. Y., 2007. Fabrication of a New MEMS Capacitive Microphone using Aluminum Diaphragm and Silicon Backplate.  ISESCO International workshop & Conference on Nanotechnology  2007 (IWCN 2007).

 

           13.    Ganji, B. A. and Majlis, B. Y., 2007. Sensitivity-Improved Silicon Capacitive Microphone with a Novel Slotted Diaphragm. International Conference on Instrumentation, Communication and Information Technology (ICICI) 2007, pp. 389-393.

 

           14.        Ganji, B. A. and Majlis, B. Y., 2007. Size Minimization of High Sensitivity Microphone using Slotted Diaphragm. International Conference on Robotics, vision, information and signal processing (ROVISP) 2007, pp. 284-288.

 

           15.        Ganji, B. A. and Majlis, B. Y., 2007. Fabrication of a New MEMS Capacitive Microphone using Aluminum Diaphragm and Silicon Backplate. 2007 IMEN Postgraduate Seminar, pp. 16-21.

 

           16.        Ganji, B. A. and Majlis, B. Y., 2008. Design and Fabrication of a Novel Single-Chip MEMS Capacitive Microphone using Slotted Diaphragm. Asia-Pacific Conference of Transducers and Micro-Nano Technology—APCOT 2008, pp. 170-173.

 

           17.        Ganji, B. A. and Majlis, B. Y., 2008. Deposition and Etching of Diaphragm and Sacrificial layer in Novel MEMS Capacitive Microphone Structure. 2008 IEEE International Conference on Semiconductor Electronics (ICSE 2008), pp. 206-212.

 

           18.        Ganji, B. A. and Majlis, B. Y., Rastegar, S., 2008. First Resonance Frequency and High Sensitivity for MEMS Acoustic Sensors. 2008 IEEE International Conference on Semiconductor Electronics (ICSE 2008), pp. 213-218.

 

     Award:

 

The invention has been contested in UKM Research and Innovation Expo 2005, organized by University Kebangsaan Malaysia.

        Date: 14-16 July, 2005

        Venue: DECTAR, UKM

         Medal won: Silver Medal

        Title: High Sensitivity MEMS Capacitive Microphone

 

     Patent:

 

    Title of invention: High Sensitivity and Small Size MEMS Capacitive Microphone

    Ref: IPS/NN/PB/001

    Date: 12th JUNE 2007

 

 

 

 

 

 

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Last updated September, 2011.